Study on SiC UV/EUV Coaxial Photodetector

Abstract In this paper, a novel 4H-SiC coaxial p-i-n ultraviolet photodetector with intense photon absorption and high quantum efficiency is studied. The spectral response electric field distribution of the detector are calculated by TCAD software. results showed that innovative has peak 0.1998 A/W at 260 nm illumination wavelength more than twice higher traditional photodetector, when under 270 nm. reaches 95.3%. Moreover, in range EUV, shows relatively response, while barely observed for photodetector. For large area problem laterally undepleted i layer can be solved multiple P+-type implanation. new structure significantly enhances rate incident light absorption, prevents conventional metal electrode P+ layer, provides an approach construction photodetectors future.